Foundry Polymer-Based Inverted-Rib Waveguides

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dc.contributor.authorMalheiros-Silveira, G. N. [UNESP]
dc.contributor.authorFinardi, C. A.
dc.contributor.authorVan Etten, E. A. M. A.
dc.contributor.authorBurger, T. S.
dc.contributor.authorSilva, R. C. G. da
dc.contributor.authorDaltrini, A. M.
dc.contributor.authorPanepucci, R. R.
dc.contributor.authorIEEE
dc.contributor.institutionCtr Tecnol Informacao CTI Renato Archer
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.contributor.institutionCEITEC SA Semicond
dc.date.accessioned2019-10-04T11:56:52Z
dc.date.available2019-10-04T11:56:52Z
dc.date.issued2018-01-01
dc.description.abstractDevelopment of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.en
dc.description.affiliationCtr Tecnol Informacao CTI Renato Archer, BR-13069901 Campinas, SP, Brazil
dc.description.affiliationUniv Estadual Paulista UNESP, Campus Expt Sao Joao da Boa Vista, BR-13876750 Sao Paulo, SP, Brazil
dc.description.affiliationCEITEC SA Semicond, BR-91550000 Porto Alegre, RS, Brazil
dc.description.affiliationUnespUniv Estadual Paulista UNESP, Campus Expt Sao Joao da Boa Vista, BR-13876750 Sao Paulo, SP, Brazil
dc.description.sponsorshipConselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)
dc.description.sponsorshipFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.description.sponsorshipIdCNPq: 456294/2013-9
dc.description.sponsorshipIdCNPq: 300594/2017-8
dc.description.sponsorshipIdFAPESP: 13/07559-3
dc.description.sponsorshipIdFAPESP: 09/54045
dc.format.extent3
dc.identifier.citation2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018.
dc.identifier.urihttp://hdl.handle.net/11449/184348
dc.identifier.wosWOS:000458662800022
dc.language.isoeng
dc.publisherIeee
dc.relation.ispartof2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc)
dc.rights.accessRightsAcesso aberto
dc.sourceWeb of Science
dc.subjectoptical device fabrication
dc.subjectoptical polymers
dc.subjectoptical resonators
dc.titleFoundry Polymer-Based Inverted-Rib Waveguidesen
dc.typeTrabalho apresentado em evento
dcterms.licensehttp://www.ieee.org/publications_standards/publications/rights/rights_policies.html
dcterms.rightsHolderIeee

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