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dc.contributor.authorWiederkehr, Rodrigo S.
dc.contributor.authorSalvadori, Maria C.
dc.contributor.authorBrugger, Juergen
dc.contributor.authorDegasperi, Francisco T. [UNESP]
dc.contributor.authorCattani, Mauro
dc.identifier.citationSmart Materials & Structures. Bristol: Iop Publishing Ltd, v. 16, n. 6, p. 2302-2307, 2007.
dc.description.abstractA microactuator made from poly(vinylidene fluoride) (PVDF), a piezoelectric polymer, was fabricated to control the gas flow rate through a glass micronozzle. The actuator was formed by gluing together two PVDF sheets with opposite polarization directions. The sheets were covered with thin conducting films on one side, that were then used as electrodes to apply an electric field to move the valve. The actuator has a rectangular shape, 3 mm x 6 mm. The device was incorporated with a micronozzle fabricated by a powder blasting technique. Upon applying a DC voltage across the actuator electrodes, one sheet expands while the other contracts, generating an opening motion. A voltage of +300 V DC was used to open the device by moving the actuator 30 mu m, and a voltage of -200 V DC was used to close the device by moving the actuator 20 mu m lower than the relaxed position. Flow measurements were performed in a low-pressure vacuum system, maintaining the microvalve inlet pressure constant at 266 Pa. Tests carried out with the actuator in the open position and with a pressure ratio (inlet pressure divided by outlet pressure) of 0.5, indicated a flow rate of 0.36 sccm. In the closed position, and with a pressure ratio of 0.2, a flow rate of 0.32 sccm was measured.en
dc.publisherIop Publishing Ltd
dc.relation.ispartofSmart Materials & Structures
dc.sourceWeb of Science
dc.titleFabrication and testing of a poly(vinylidene fluoride) (PVDF) microvalve for gas flow controlen
dcterms.rightsHolderIop Publishing Ltd
dc.contributor.institutionUniversidade de São Paulo (USP)
dc.contributor.institutionEcole Polytech Fed Lausanne
dc.contributor.institutionUniversidade Estadual Paulista (UNESP)
dc.description.affiliationUniv São Paulo, Inst Phys, BR-0531970 São Paulo, Brazil
dc.description.affiliationEcole Polytech Fed Lausanne, Microsyst Lab, Stn 17, CH-1015 Lausanne, Switzerland
dc.description.affiliationUniv Estadual Paulista, CEETEPS, Fac Tecnol São Paulo, São Paulo, Brazil
dc.description.affiliationUnespUniv Estadual Paulista, CEETEPS, Fac Tecnol São Paulo, São Paulo, Brazil
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