DC method for self-heating estimation applied to FinFET
Abstract
This paper reports an extension on the application of the DC method for the estimation of self-heating effects from planar to FinFET devices, verified through theoretical considerations and numerical simulations. In the worst case, a difference of 5.6% was observed on the estimation of the transistors channel temperature when compared to a traditional method.
How to cite this document
Mori, C. A.B.; Agopian, P. G.D.; Martino, J. A.. DC method for self-heating estimation applied to FinFET. 33rd Symposium on Microelectronics Technology and Devices, SBMicro 2018. Available at: <http://hdl.handle.net/11449/187113>.
Language
English
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